The FEI Teneo, a field emission scanning electron microscope (FESEM), is GEM’s analytical SEM. The Teneo has several detectors, including a segmented backscatter detector, a standard Everhart-Thornley secondary electron detector, and three in-lens secondary electron detectors. Imaging can be accomplished using an accelerating voltage of 500 V–30 kV. The Teneo has beam deceleration capabilities, which can mitigate charging effects for non-conductive samples. It also has scanning transmission (STEM) capabilities with a resolution of 0.8 nm while operating at 30 kV, and can provide data in brightfield, darkfield, and high angle dark field modes. The Teneo is equipped with an extremely large area (150 mm Oxford XMaxN) detector for energy-dispersive spectroscopy (EDS) that provides elemental analysis and rapid elemental mapping (including boron). The Teneo also has a Deben cool stage that can maintain a temperature of ≤–25 oC.
FEI, Inc., Hillsboro OR USA
EDS: Oxford Instruments, Concord, MA USA